推荐回答(2个)
TFT LCD其实就是一种中底端的液晶显示屏~他早期在笔记本计算机上使用现在大量用在手机~MP3~MP4~等电子产品上~!
TFT LCD技术是微电子技术和LCD技术巧妙结合的高新技术。利用微电子精细加工技术和Si材料处理技术,开发大面积玻璃基板上生长Si材料和TFT平面阵列的工艺技术,与日益成熟的LCD制作技术相结合,不断提高产品的显示品质,增强自动化大规模生产能力,大幅度地提高产量,提高合格率,降低成本,性能/价格比向CRT接近。
---- 在显示品质方面,以分辨率为例,由CGA(320×200)、VGA(640×480)、SVGA(800×600)、XGA(1024×768)、SXGA(1280×1024)到UXGA(1600×1200),大约7年时间。图1表示TFT LCD分辨率发展速度,基本符合摩尔定律。说明TFT LCD发展速度和计算机芯片发展速度一致,这正是TFT LCD与计算机适配性和发展速度的同步性。
---- 表1 各种引线技术
最小间隙(μm) 分辨率(线/英寸) 成本(美元/块)
COB 280 100 380
TAB 170 150 190
COG 60 400 110
集成技术 25 1000 30
---- 为进一步提高TFT LCD分辨率,要减小TFT尺寸,并保证开口率,同时涉及到引线技术的有限性。表1列出当前采用各种引线技术的引线密度。为了解决高分辨率显示,只好采用p-Si材料,把周边驱动的电路集成到屏上。高温多晶硅技术已实现周边驱动电路集成到LCD屏上,应用于投影显示。但多晶硅生产温度高于1000℃,衬底用石英基板,石英板成本高。因此,人们研究开发在玻璃衬底上生长低温p-Si技术,有低压PECVD技术可在玻璃衬底上生长p-Si,还有把a-Si材料重结晶成p-Si,如有金属诱导生长法和激光退火法。当前,低温p-Si TFT LCD的大规模生产,主要采用XeCl准分子激光退火(ELA)技术。用PECVD法在400×500mm2玻璃基板上生长50nm厚度a-Si薄膜,用激光退火重结晶得到如图2所示的p-Si晶粒[1],图中照片表示不同晶粒大小的扫描电镜形貌。晶粒小于0.3μm时,迁移率与晶粒大小很密切,大于0.3μm开始,空穴迁移率几乎不变,这表明在ELA过程中形成的浅能级陷阱束缚空穴。电子迁移率晶粒尺寸变大,缓慢增加,迁移率为100~200cm2/vs。为了得到均匀的TFT开关特性,p-Si晶粒尺寸控制在1μm左右。
---- 图3表示C-MOS结构周边驱动集成电路的n沟道和p沟道p-Si TFT断面图。在玻璃衬底上涂SiN/SiO2层,防止玻璃中碱金属浸入到Si有源层,低电阻合金作为栅极和栅线。防止ELA过程中融蚀a-Si层,在a-Si中H浓度控制在1原子%左右。在n沟道TFT中采用轻掺杂漏极(LDD)结构改善了可靠性和降低暗电流。图4给出n沟道和p沟道TFT I-V特性。沟道宽度(W)和长度(L)分别为9μm和4.5μm,电子和空穴迁移率分别为μn=236cm2/vs和μp=120cm2/vs,阈
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